Liquid purification or separation – Processes – Utilizing electrical or wave energy directly applied to...
Reexamination Certificate
2007-01-02
2007-01-02
Hopkins, Robert A. (Department: 1724)
Liquid purification or separation
Processes
Utilizing electrical or wave energy directly applied to...
C210S259000, C210S295000, C210S502100
Reexamination Certificate
active
10807405
ABSTRACT:
Object of the preferred embodiment is to remove sol-form microparticles and nitrogen components contained in CMP wastewater. Sol-form microparticle components contained in CMP wastewater are removed by a filtration treatment using a filter device13, having a gel-form second filter. Also, nitrogen components in the CMP wastewater are removed by an electrochemical treatment using electrode12. The filtration treatment and the electrochemical treatment can be carried out in individual tanks or can be carried out in the same tank. By performing the filtration treatment and the electrochemical treatment in the same tank, a space-saving water treatment device can be provided.
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Iinuma Hirofumi
Ikematsu Mineo
Iseki Masahiro
Rakuma Tsuyoshi
Takaoka Daizo
Hopkins Robert A.
Morrison & Foerster / LLP
Sanyo Electric Co,. Ltd.
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