Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Reexamination Certificate
2007-03-06
2007-03-06
Kwok, Helen (Department: 2856)
Measuring and testing
Speed, velocity, or acceleration
Acceleration determination utilizing inertial element
C073S514310
Reexamination Certificate
active
11345541
ABSTRACT:
A MEMS device and method of manufacturing comprises a magnetic sensor attached to a frame; at least one magnet adjacent to the magnetic sensor; a proof mass attached to the magnet; a cantilever beam attached to the proof mass; and a rod attached to the cantilever beam and the frame, wherein the magnet is adapted to rotate about a longitudinal axis of the rod. The proof mass comprises a portion of a SOI wafer. An acceleration of the frame causes the magnet to move relative to the frame and the magnetic sensor. An acceleration of the frame causes the connecting member to bend. The motion of the magnet causes a change in a magnetic field at a position of the magnetic sensor, wherein the change in the magnetic field is detected by the magnetic sensor, and wherein a sensitivity of detection of the acceleration of the device is approximately 0.0001 g.
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Kwok Helen
Stolarun Edward L.
The United States of America as represented by the Secretary of
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