Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate
2007-07-24
2007-07-24
Stafira, Michael P. (Department: 2886)
Optics: measuring and testing
Inspection of flaws or impurities
Surface condition
C356S237400, C356S237500
Reexamination Certificate
active
10724750
ABSTRACT:
The present invention is an apparatus for inspecting foreign particles/defects, comprises an illumination optical system, a detection optical system, a shielding unit which is provided in said detection optical system to selectively shield diffracted light pattern coming from circuit pattern existing on an inspection object and an arithmetic processing system, wherein said shielding unit comprises a micro-mirror array device or a reflected type liquid crystal, or a transmission type liquid crystal, or an object which is transferred a shielding pattern to an optical transparent substrate, or a substrate or a film which is etched so as to leave shielding patterns, or an optical transparent substrate which can be changed in transmission by heating, sudden cold, or light illumination, or change of electric field or magnetic field, or a shielding plate of cylindrical shape or plate shape.
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Hamamatsu Akira
Jingu Takahiro
Nishiyama Hidetoshi
Noguchi Minori
Ohshima Yoshimasa
Antonelli, Terry Stout & Kraus, LLP.
Hitachi High-Technologies Corporation
Stafira Michael P.
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