Piezoelectrically controllable microfluid actor system

Details Piezoelectrically controllable microfluid actor system Piezoelectrically controllable microfluid actor system

2007-05-15

2007-05-15

Gordon, Brian R. (Department: 1743)

Chemical apparatus and process disinfecting, deodorizing, preser

Control element responsive to a sensed operating condition

C347S068000, C347S071000, C347S072000, C347S048000

Reexamination Certificate

active

10349775

ABSTRACT:
A piezoelectrically controllable microfluid actor system, comprising a planar substrate which has at least one cavity on at least one side and has at least one passage which has an aperture in the cavity, and at least one diaphragm which has its border mounted on one side of the substrate so as to span the cavity, which has at least two superposed and interconnected diaphragm layers of which at least one is an electrically controllable piezoceramic element, and which is adapted to be deflected into the cavity by means of an electric drive.

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