Piezoelectric resonator, method for manufacturing the same,...

Details Piezoelectric resonator, method for manufacturing the same,... Piezoelectric resonator, method for manufacturing the same,...

2007-07-17

2007-07-17

Schuberg, Darren (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S360000

Reexamination Certificate

active

11193536

ABSTRACT:
A piezoelectric resonator suitable for use in a high frequency band is provided, in which variation in the piezoelectric material is reduced, variation in performance is reduced, and production can be performed without the need for a polarization treatment step. In the piezoelectric resonator, a piezoelectric material made of a wurtzite structure compound crystal is disposed, the crystal epitaxially grown in such a way that a (1,1,−2,0) crystal face becomes parallel to a surface of the R-plane sapphire substrate having a (0,1,−1,2) crystal face parallel to the substrate surface, and a pair of excitation electrodes are disposed on a pair of principal surfaces opposite to each other in the thickness direction of the piezoelectric material in such a way that the pair of excitation electrodes sandwich the C plane which is a (0,0,0,1) crystal face perpendicular to the (1,1,−2,0) crystal face of the tabular piezoelectric material.

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Machine translation of JP 2001-044794.

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