Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Reexamination Certificate
2007-04-17
2007-04-17
Kwok, Helen (Department: 2856)
Measuring and testing
Speed, velocity, or acceleration
Angular rate using gyroscopic or coriolis effect
C073S504120
Reexamination Certificate
active
11360846
ABSTRACT:
Resonator structures include a plurality of resonator masses interconnected by a plurality of levers so as to resonate in anti-phase with one another. The levers include a plurality of lever fingers interdigitated with corresponding fixed fingers affixed to an underlying substrate for at least one of driving movement of the levers and sensing movement of the levers relative to the fixed fingers.
REFERENCES:
patent: 2309853 (1943-02-01), Lyman et al.
patent: 4381672 (1983-05-01), O'Connor et al.
patent: 4510802 (1985-04-01), Peters
patent: 4524619 (1985-06-01), Staudte
patent: 4598585 (1986-07-01), Boxenhorn
patent: 4654663 (1987-03-01), Alsenz et al.
patent: 4744248 (1988-05-01), Stewart
patent: 4744249 (1988-05-01), Stewart
patent: 4884446 (1989-12-01), Ljung
patent: 5016072 (1991-05-01), Greiff
patent: 5016076 (1991-05-01), Darwish
patent: 5025346 (1991-06-01), Tang et al.
patent: 5056366 (1991-10-01), Fersht et al.
patent: 5111693 (1992-05-01), Greiff
patent: 5144184 (1992-09-01), Greiff
patent: 5195371 (1993-03-01), Greiff
patent: 5203208 (1993-04-01), Bernstein
patent: 5216490 (1993-06-01), Greiff et al.
patent: 5241861 (1993-09-01), Hulsing, II
patent: 5259247 (1993-11-01), Bantien
patent: 5273939 (1993-12-01), Becker et al.
patent: 5313835 (1994-05-01), Dunn
patent: 5329815 (1994-07-01), Dunn et al.
patent: 5341682 (1994-08-01), Hulsing, II
patent: 5343749 (1994-09-01), Macy
patent: 5349855 (1994-09-01), Bernstein et al.
patent: 5359893 (1994-11-01), Dunn
patent: 5367217 (1994-11-01), Norling
patent: 5377544 (1995-01-01), Dunn
patent: 5392650 (1995-02-01), O'Brien et al.
patent: 5408877 (1995-04-01), Greiff et al.
patent: 5481914 (1996-01-01), Ward
patent: 5492596 (1996-02-01), Cho
patent: 5496436 (1996-03-01), Bernstein et al.
patent: 5505084 (1996-04-01), Greiff et al.
patent: 5511419 (1996-04-01), Dunn
patent: 5515724 (1996-05-01), Greiff et al.
patent: 5530342 (1996-06-01), Murphy
patent: 5535902 (1996-07-01), Greiff
patent: 5537872 (1996-07-01), Frere et al.
patent: 5555765 (1996-09-01), Greiff
patent: 5574222 (1996-11-01), Offenberg
patent: 5581035 (1996-12-01), Greiff
patent: 5600064 (1997-02-01), Ward
patent: 5600065 (1997-02-01), Kar et al.
patent: 5604309 (1997-02-01), Ward
patent: 5604312 (1997-02-01), Lutz
patent: 5608351 (1997-03-01), Ward
patent: 5635638 (1997-06-01), Geen
patent: 5635639 (1997-06-01), Greiff et al.
patent: 5635640 (1997-06-01), Geen
patent: 5646348 (1997-07-01), Greiff et al.
patent: 5650568 (1997-07-01), Greiff et al.
patent: 5672949 (1997-09-01), Ward
patent: 5696323 (1997-12-01), Hulsing, II
patent: 5717140 (1998-02-01), Hulsing, II
patent: 5734105 (1998-03-01), Mizukoshi
patent: 5747961 (1998-05-01), Ward et al.
patent: 5763781 (1998-06-01), Netzer
patent: 5767405 (1998-06-01), Bernstein et al.
patent: 5783973 (1998-07-01), Weinberg et al.
patent: 5795988 (1998-08-01), Lo et al.
patent: 5796001 (1998-08-01), Greiff et al.
patent: 5869760 (1999-02-01), Geen
patent: 5886816 (1999-03-01), Faris
patent: 5892153 (1999-04-01), Weinberg et al.
patent: 5895850 (1999-04-01), Buestgens
patent: 5895851 (1999-04-01), Kano et al.
patent: 5911156 (1999-06-01), Ward et al.
patent: 5918280 (1999-06-01), Gang et al.
patent: 5920012 (1999-07-01), Pinson
patent: 5945600 (1999-08-01), Touge et al.
patent: 5952572 (1999-09-01), Yamashita et al.
patent: 5955668 (1999-09-01), Hsu et al.
patent: 5987986 (1999-11-01), Wyse et al.
patent: 5992233 (1999-11-01), Clark
patent: 6009751 (2000-01-01), Ljung
patent: 6032531 (2000-03-01), Roszhart
patent: 6044707 (2000-04-01), Kato
patent: 6064169 (2000-05-01), Ward et al.
patent: 6067858 (2000-05-01), Clark et al.
patent: 6070463 (2000-06-01), Moriya et al.
patent: 6070464 (2000-06-01), Koury, Jr. et al.
patent: 6089089 (2000-07-01), Hsu
patent: 6122961 (2000-09-01), Geen et al.
patent: 6128953 (2000-10-01), Mizukoshi
patent: 6155115 (2000-12-01), Ljung
patent: 6164134 (2000-12-01), Cargille
patent: 6189381 (2001-02-01), Huang et al.
patent: 6190571 (2001-02-01), Kato
patent: 6230563 (2001-05-01), Clark et al.
patent: 6250156 (2001-06-01), Seshia et al.
patent: 6250157 (2001-06-01), Touge
patent: 6257059 (2001-07-01), Weinberg et al.
patent: 6282960 (2001-09-01), Samuels et al.
patent: 6289733 (2001-09-01), Challoner et al.
patent: 6311555 (2001-11-01), McCall et al.
patent: 6321598 (2001-11-01), Iwaki et al.
patent: 6505511 (2003-01-01), Geen et al.
patent: 6516666 (2003-02-01), Li
patent: 6561029 (2003-05-01), Folkmer et al.
patent: 6767758 (2004-07-01), Geen
patent: 6860151 (2005-03-01), Flatt et al.
patent: 6877374 (2005-04-01), Geen
patent: 7032451 (2006-04-01), Geen
patent: 2003/0005767 (2003-01-01), Hulsing, II
patent: 2003/0131664 (2003-07-01), Mochida et al.
patent: 2003/0131669 (2003-07-01), Osawa
patent: WO 93/05401 (1993-03-01), None
patent: WO 96/39615 (1996-12-01), None
patent: WO 01/79862 (2001-10-01), None
Weinberg et al.,A Micromachined Comb-Drive Tuning Fork Rate Gyroscope, Proceedings of the 49thAnnual Meeting of the Institute of Navigation, Jun. 21-23, 1993, 7 pages.
Seshia et al.,Integrated Microelectromechanical Resonant Output Gyroscope, updated, online <http://hera.berkeley.edu/IRO/Summary/olabstracts / aseshia.1.htm>, printed Feb. 6, 2002, 2 pages.
Geen et al.,Single-Chip Surface Micromachined Integrated Gyroscope with 50°/h Allan Deviation, IEEE Journal of Solid-State Circuits, vol. 37, No. 12, Dec. 2002, 7 pages.
A Comb-drive Piezoresistive Vibratory Gyroscope, online <http://mems.stanford.edu/˜lian/gyro.html>, printed Feb. 6, 2002, 4 pages.
International Search Report for International Application No. PCT/US 03/03615, Jun. 2, 2003, 5 pages.
Analog Devices Inc.
Bromberg & Sunstein LLP
Kwok Helen
LandOfFree
Micromachined apparatus with drive/sensing fingers in... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Micromachined apparatus with drive/sensing fingers in..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Micromachined apparatus with drive/sensing fingers in... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3786580