Monolithic vertical integration of an acoustic resonator and...

Details Monolithic vertical integration of an acoustic resonator and... Monolithic vertical integration of an acoustic resonator and...

2007-07-24

2007-07-24

Summons, Barbara (Department: 2817)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C029S025350, C257S499000, C257S416000, C438S023000, C438S026000, C438S050000

Reexamination Certificate

active

11079776

ABSTRACT:
Monolithic devices that include an acoustic resonator vertically integrated with electronic circuitry are described. In one aspect, a monolithic integrated device includes a substrate, electronic circuitry supported by the substrate, an acoustic isolator over the electronic circuitry, and an acoustic resonator on the acoustic isolator. A method of fabricating the monolithic device also is described.

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