Substrate detecting apparatus

Details Substrate detecting apparatus Substrate detecting apparatus

2007-05-22

2007-05-22

Stinson, Frankie L. (Department: 1746)

Cleaning and liquid contact with solids

Apparatus

Automatic controls

C134S113000, C134S902000

Reexamination Certificate

active

10631724

ABSTRACT:
A substrate cleaning apparatus includes a bath in the form of a vessel filled with a cleaning liquid, a substrate guide disposed on the bottom of the vessel and configured to support at least one substrate vertically, a first sensing unit for sensing the substrate(s) supported by the guide, and a second sensing unit for sensing substrates or remnants thereof disposed on the bottom of the vessel. The first sensing unit has sensor elements installed on the opposite sides of the vessel as situated across from one another. The second sensing unit has sensor elements installed on both sides and on the bottom of the vessel for detecting substrates or remnants from damaged substrates lying on the bottom of the process chamber.

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European Patent Office 1 096 548 May 2001.

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