Method and system for measuring thin films

Details Method and system for measuring thin films Method and system for measuring thin films

2007-07-31

2007-07-31

Toatley, Jr., Gregory J. (Department: 2886)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S632000

Reexamination Certificate

active

10494577

ABSTRACT:
An optical system is presented for use in a measurement system (100) for use in measurements of thin films of a workpiece (W), the system comprising an optical assembly (14), comprising illuminator assembly, a detector assembly, and a light directing assembly (FA-OF) for directing illuminating light to a plurality of measurement sites in the workpiece (W) arranged in an array of substantially concentric ring-like regions, such that an area defined by the measurement sites within one of the substantially concentric ring-like regions is substantially equal to that of the other substantially concentric ring-like region.

REFERENCES:
patent: 6608676 (2003-08-01), Zhao et al.

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