Sampling management for a process analysis tool to minimize...

Details Sampling management for a process analysis tool to minimize... Sampling management for a process analysis tool to minimize...

2007-01-02

2007-01-02

Warden, Jill (Department: 1743)

Chemical apparatus and process disinfecting, deodorizing, preser

Analyzer, structured indicator, or manipulative laboratory...

Means for analyzing liquid or solid sample

C422S081000, C422S082010, C422S082050, C422S091000, C422S105000, C422S105000

Reexamination Certificate

active

10658948

ABSTRACT:
A method and system for analysis of additives in electrolysis plating solutions, using a flow management system that minimizes loss of plating solutions and decreases sampling time. The system includes at least one analysis chamber, a sampling duct connected to processing tool, a four-way valve positioned between the processing tool and the sampling duct, at least one carrier fluid duct connected to the analysis chamber, at least one actuatable multi-port valve that provides a transference platform between the sampling duct and the at least one carrier fluid duct, and a flow sensor connected to the sampling duct and positioned downstream from the at least one actuatable multi-port valve.

REFERENCES:
patent: 4326940 (1982-04-01), Eckles et al.
patent: 5106413 (1992-04-01), Takehawa
patent: 6495011 (2002-12-01), Robertson
patent: 6592737 (2003-07-01), Robertson

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