Optical microcantilever, manufacturing method thereof, and...

Measuring and testing – Surface and cutting edge testing – Roughness

Reexamination Certificate

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Reexamination Certificate

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11602373

ABSTRACT:
An optical microcantilever capable of reducing loss when propagating light. An optical microcantilever10comprises a support1, an optical waveguide2, a light-blocking film3, a reflecting film4, a pointed tip5, a microscopic aperture6formed at the end of the tip5, and a mirror7for reflecting propagating light H propagated from a light input/output end8of the optical waveguide2towards the microscopic aperture6.

REFERENCES:
patent: 0884617 (1998-12-01), None

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