Process of making a piezoelectric thin film component

Details Process of making a piezoelectric thin film component Process of making a piezoelectric thin film component

2007-07-10

2007-07-10

Tugbang, A. Dexter (Department: 3729)

Metal working

Piezoelectric device making

C029S890100, C427S100000, C427S226000, C427S419800

Reexamination Certificate

active

10815757

ABSTRACT:
A method for manufacturing a piezoelectric thin film component wherein a thin titanium film is deposited on a bottom metal layer such that parts of the thin titanium film remain on crystal grain boundaries of the bottom metal layer and form seed crystals. A polycrystalline piezoelectric thin film is formed on the bottom metal layer so that a pervoskite crystalline lattice is grown from the seed crystals.

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