Piezoelectric element, composite piezoelectric element, and...

Details Piezoelectric element, composite piezoelectric element, and... Piezoelectric element, composite piezoelectric element, and...

2007-05-29

2007-05-29

Schuberg, Darren (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S363000, C310S364000, C310S366000, C310S320000

Reexamination Certificate

active

10990435

ABSTRACT:
A piezoelectric element of the present invention includes a substrate, a lower electrode layer, a piezoelectric layer, an upper electrode layer, a cavity portion formed below a piezoelectric vibrating portion, and at least two bridging portions. The at least two bridging portions are formed so as not to be line-symmetric with respect to any line segment traversing the piezoelectric vibrating portion and/or so as not to be point-symmetric with respect to any point in the piezoelectric vibrating portion in a projection of the piezoelectric vibrating portion in the laminating direction.

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K. Lakin, Institute of Electrical and Electronics Engineers: “Thin film resonator technology”, Proceedings of the 2003 IEEE International Frequency Control Symposium & PDA Exhibition Jointly with the 17th, European Frequency and Time Forum. Tampa, FL, May 4-8, 2003, IEEE International Frequency Control Symposium, New York, NY: IEEE, US, May 4, 2003 pp. 765-778 XP010688892.

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