Method for making optical devices with a moving mask and...

Details Method for making optical devices with a moving mask and... Method for making optical devices with a moving mask and...

2007-01-02

2007-01-02

Wood, Kevin S. (Department: 2874)

Optical waveguides

With optical coupler

Input/output coupler

C385S129000

Reexamination Certificate

active

10081995

ABSTRACT:
The present invention provides a method for forming a vertical taper in a waveguide. In the present invention, a shadow mask is disposed above a waveguide requiring a vertical taper. Then, the waveguide is exposed to a directional etching process (e.g. deep reactive ion etching) while the mask is moved. Ask the mask moves, different regions of the waveguide will be etched different depths, resulting in a vertical taper in the waveguide.

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