Apparatus for synthesis of layers, coatings or films

Details Apparatus for synthesis of layers, coatings or films Apparatus for synthesis of layers, coatings or films

2007-01-16

2007-01-16

McDonald, Rodney G. (Department: 1753)

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

C204S298150, C204S298230, C204S298250, C118S715000, C118S718000, C118S719000

Reexamination Certificate

active

10932222

ABSTRACT:
Systems and methods are described for the synthesis of films, coatings or layers. An apparatus includes a first holder; a second holder coupled to the first holder; a linkage coupled to the first holder and the second holder to move the first holder relative to the second holder; a reusable tool coupled to the first holder, the reusable tool including a raised patterned surface; and a release layer coupled to the raised patterned surface of the reusable tool.

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