Micro-electromechanical structure resonator frequency...

Details Micro-electromechanical structure resonator frequency... Micro-electromechanical structure resonator frequency...

2007-07-17

2007-07-17

Dougherty, Thomas M. (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S309000, C310S331000, C310S348000, C310S363000

Reexamination Certificate

active

10763779

ABSTRACT:
The invention relates to a microbeam oscillator. Tuning of the oscillator is carried out by addition or subtraction of material to an oscillator member in order to change the mass of the oscillator member.

REFERENCES:
patent: 2836737 (1958-05-01), Crownover
patent: 3683213 (1972-08-01), Staudte
patent: 3766616 (1973-10-01), Staudte
patent: 3913195 (1975-10-01), Beaver
patent: 3940638 (1976-02-01), Terayama
patent: 3969640 (1976-07-01), Staudte
patent: 4012648 (1977-03-01), Engdahl
patent: 4051582 (1977-10-01), Eschler et al.
patent: 4109359 (1978-08-01), Cross et al.
patent: 4131484 (1978-12-01), Caruso et al.
patent: 4209914 (1980-07-01), Gustafsson
patent: 4429248 (1984-01-01), Chuang
patent: 4443729 (1984-04-01), Rider
patent: 5185055 (1993-02-01), Temple et al.
patent: 5696491 (1997-12-01), White et al.
patent: 5913244 (1999-06-01), Heinouchi
patent: 5920422 (1999-07-01), Kim
patent: 6094289 (2000-07-01), Moranski et al.
patent: 6126311 (2000-10-01), Schuh
patent: 6189367 (2001-02-01), Smith et al.
patent: 6249074 (2001-06-01), Zimnicki et al.
patent: 6307447 (2001-10-01), Barber et al.
patent: 6359371 (2002-03-01), Perkins et al.
patent: 6437667 (2002-08-01), Barber et al.
patent: 6441702 (2002-08-01), Ella et al.
patent: 6448622 (2002-09-01), Franke et al.
patent: 6545386 (2003-04-01), Nakafuku
patent: 6566617 (2003-05-01), Suzuki et al.
patent: 6600323 (2003-07-01), Kieres et al.
patent: 6700312 (2004-03-01), Iizuka et al.
patent: 6722206 (2004-04-01), Takada
patent: 6753639 (2004-06-01), Ma et al.
patent: 6924582 (2005-08-01), Shimizu et al.
patent: 6943484 (2005-09-01), Clark et al.
patent: 2002/0074897 (2002-06-01), Ma et al.
patent: 2002/0158702 (2002-10-01), Tikka et al.
patent: 2004/0251781 (2004-12-01), Bouche et al.
patent: 1468960 (2004-10-01), None
patent: 58-47311 (1983-03-01), None
patent: 60-242800 (1985-12-01), None
patent: 1-198284 (1989-08-01), None
patent: 1-315279 (1989-12-01), None
patent: 06-204778 (1994-07-01), None
patent: 2004-80468 (2004-03-01), None
Martin, S. J. et al., “Polymer Film Characterization Using Quarts Resonators,” IEEE Proceedings 1991 Ultrasonics Symposium, vol. 1, Dec. 1991, pp. 393-398.
Application No. 09/738,118, Filing date Dec. 15, 2000, Qing Ma et al., “A Process of Making A Micro-Electromechanical Structure Resonator With Frequency Adjustment,” Office Action mailed Jun. 15, 2004. (42P10077).
Application No. 09/738,118, Filing date Dec. 15, 2000, Qing Ma et al., “A Process of Making A Micro-Electromechanical Structure Resonator With Frequency Adjustment,” Office Action mailed Dec. 17, 2004. (42P10077).
Application No. 09/738,118, Filing date Dec. 15, 2000, Qing Ma et al., “A Process of Making A Micro-Electromechanical Structure Resonator With Frequency Adjustment,” Office Action mailed Nov. 30, 2005. (42P10077).
Application No. 09/738,118, Filing date Dec. 15, 2000, Qing Ma et al., “A Process of Making A Micro-Electromechanical Structure Resonator With Frequency Adjustment,” Office Action mailed Jun. 1, 2006. (42P10077).
Application No. 09/738,118, Filing date Dec. 15, 2000, Qing Ma et al., “A Process of Making A Micro-Electromechanical Structure Resonator With Frequency Adjustment,” Office Action mailed Oct. 6, 2006. (42P10077).
Application No. 10/386,062, Filing date Mar. 10, 2003, Qing Ma et al., “Micro-Electromechanical Structure Resonator Frequency Adjustment Using Radiant Energy Trimming and Laser/Focused Ion Beam Assisted Deposition,” Office Action mailed Sep. 15, 2003. (42P10077D).
Application No. 10/386,062, Filing date Mar. 10, 2003, Qing Ma et al., “Micro-Electromechanical Structure Resonator Frequency Adjustment Using Radiant Energy Trimming and Laser/Focused Ion Beam Assisted Deposition,” Office Action mailed Dec. 4, 2003. (42P10077D).
Application No. 10/804,897, Filing date Mar. 19, 2004, Qing Ma et al., “Process for Tuning an Oscillator,” Office Action mailed Dec. 13, 2005. (42P10077D3).
Application No. 10/804,897, Filing date Mar. 19, 2004, Qing Ma et al., “Process for Tuning an Oscillator,” Office Action mailed Oct. 5, 2006. (42P10077D3).

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