Infrared sensor device and its manufacturing method

Details Infrared sensor device and its manufacturing method Infrared sensor device and its manufacturing method

2007-04-24

2007-04-24

Porta, David (Department: 2884)

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

C250S336100

Reexamination Certificate

active

11190957

ABSTRACT:
An infrared sensor device includes an infrared sensor element in which a membrane is formed on a surface side of a substrate by forming a concave portion on a rear face side of the substrate, and electrodes for detection are arranged on the surface side of the substrate, and an infrared ray absorbing film for absorbing the energy of an infrared ray by receiving the infrared ray is arranged at the membrane on the rear face side of said substrate. The substrate is electrically connected to a circuit substrate through a bump in a state in which the surface side of the substrate is opposed to the circuit substrate.

REFERENCES:
patent: 7122797 (2006-10-01), Guo et al.
patent: 2000298063 (2000-10-01), None
patent: A-2003-270047 (2003-09-01), None

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