Gas separation – Combined or convertible
Reexamination Certificate
2007-03-06
2007-03-06
Pham, Minh-Chau T. (Department: 1724)
Gas separation
Combined or convertible
C055S385200, C096S132000, C454S187000, C355S030000, C355S053000, C422S112000, C422S122000, C210S091000, C250S311000, C250S492100
Reexamination Certificate
active
11186953
ABSTRACT:
Disclosed is a semiconductor exposure apparatus which includes a chamber for accommodating therein a main unit of the exposure apparatus, a gas controlling unit for controlling a gas in the chamber, a chemical filter for attracting a chemical substance in a controlling gas, and a dust removing filter for catching a dust particle in a controlling gas, wherein a gas blowing area of the chemical filter is smaller than that of the dust removing filter wherein said chemical filter and said dust removing filter are disposed separately from each other. The chemical filter is mounted obliquely with respect to a direction of flow of a supplied gas. A gas rectifying device is disposed at a gas inlet side of the chemical filter and the dust removing filter. The chemical filter can be a pleat filter, and it is mounted so that the pleat thereof is orthogonal to the direction of flow of the supplied air.
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Keiko Kanzawa, Junichi Kitano, “A Semiconductor Device Manufacturer's Efforts For Controlling and Evaluating Atmospheric Pollution”, 1995 IEEE/SEMI Advanced Semiconductor Manufacturing Conference pp. 190-193.
Arakawa Kiyoshi
Nakano Hitoshi
Canon Kabushiki Kaisha
Fitzpatrick ,Cella, Harper & Scinto
Pham Minh-Chau T.
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