Spatial filtering in interferometry

Details Spatial filtering in interferometry Spatial filtering in interferometry

2007-07-31

2007-07-31

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S500000

Reexamination Certificate

active

11090657

ABSTRACT:
Spatial filtering of beams in interferometry systems is used to reduce a displacement of the beams from an optical path corresponding to the path of the beams in an optimally-aligned system. By reducing beam displacement from the optical path, the system reduces the magnitude of beam shears and associated non-cyclic errors in linear and angular displacements measured by the interferometry systems.

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