Alignment apparatus, exposure apparatus, and device...

Details Alignment apparatus, exposure apparatus, and device... Alignment apparatus, exposure apparatus, and device...

2007-03-20

2007-03-20

Lee, K. (Department: 2832)

Electricity: magnetically operated switches, magnets, and electr

Magnets and electromagnets

With magneto-mechanical motive device

C335S285000, C269S008000

Reexamination Certificate

active

10670241

ABSTRACT:
An alignment apparatus moves an X-Y slider together with X and Y beams. Electromagnetic guides (electromagnetic mechanisms) are interposed between the X-Y slider, the X beam, and the Y beam. The electromagnetic guides include alignment and acceleration electromagnets attached to the X-Y slider, and targets attached to the X and Y beams. The alignment electromagnet is feedback-controlled, whereas the acceleration electromagnet is feedforward-controlled.

REFERENCES:
patent: 5228358 (1993-07-01), Sakino et al.
patent: 5841250 (1998-11-01), Korenage et al.
patent: 6037680 (2000-03-01), Korenaga et al.
patent: 6538348 (2003-03-01), Sawai et al.
patent: 6584367 (2003-06-01), Makino et al.
patent: 6654098 (2003-11-01), Asano et al.
patent: 6891597 (2005-05-01), Sekiguchi
patent: 2001/0019229 (2001-09-01), Sawai et al.
patent: 09167792 (1997-06-01), None
patent: 2001-22448 (2001-01-01), None
patent: 3145355 (2001-01-01), None
patent: 2001-238485 (2001-08-01), None
Japanese Office Action dated Jul. 11, 2005, issued in corresponding Japanese patent application number 2003-324688.

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