Fluid flow sensor and fluid flow measurement device

Details Fluid flow sensor and fluid flow measurement device Fluid flow sensor and fluid flow measurement device

2007-09-18

2007-09-18

Patel, Harshad (Department: 2855)

Measuring and testing

Volume or rate of flow

Thermal type

Reexamination Certificate

active

11206820

ABSTRACT:
A Thermal type fluid flow sensor comprises a heating resistor formed on a thin film of a substrate, and plural thermal sensitive resistors configuring a bridge circuit. The thermal sensitive resistors are disposed on the thin film of the substrate so as to be located on an adjacent upstream side and an adjacent downstream side of the heating resistor in a stream direction of fluid to be measured. Resistor traces for the thermal sensitive resistors are formed so that the respective thermal sensitive resistors exhibit substantially equal changes in resistance with each other to distortion caused in the thin film.

REFERENCES:
patent: 5461913 (1995-10-01), Hinkle et al.
patent: 6357294 (2002-03-01), Nakada
patent: 6557411 (2003-05-01), Yamada et al.
patent: 6571621 (2003-06-01), Watanabe et al.
patent: 6745625 (2004-06-01), Ariyoshi
patent: 2002-048616 (2002-02-01), None

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