Semiconductor device manufacturing: process – Having magnetic or ferroelectric component
Reexamination Certificate
2007-05-15
2007-05-15
Baumeister, B. William (Department: 2891)
Semiconductor device manufacturing: process
Having magnetic or ferroelectric component
C257S295000, C257SE21664, C257SE27104
Reexamination Certificate
active
11147039
ABSTRACT:
A method for manufacturing a ferroelectric capacitor in accordance with the present invention includes: (a) a step of forming a ferroelectric laminated body by successively laminating a lower electrode layer, a ferroelectric layer and an upper electrode layer over a base substrate; (b) a step of patterning at least the upper electrode layer and the ferroelectric layer by dry etching; (c) a step of coating a coating composition including a compound having an element composing the ferroelectric layer at least on a side wall of the ferroelectric layer; and (d) a step of thermally treating the coating composition, to crystallize the coating composition coated on the side wall of the ferroelectric layer.
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Kijima Takeshi
Nakayama Masao
Anya Igwe U.
Baumeister B. William
Harness & Dickey & Pierce P.L.C.
Seiko Epson Corporation
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