Cooling system, exposure apparatus having the same, and...

Details Cooling system, exposure apparatus having the same, and... Cooling system, exposure apparatus having the same, and...

2007-05-01

2007-05-01

Rutledge, D. (Department: 2851)

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

C355S067000, C355S071000

Reexamination Certificate

active

10953205

ABSTRACT:
Disclosed is cooling technology in one aspect of which is a cooling system for cooling an optical member including a material having a linear expansion coefficient that becomes equal to zero at a predetermined temperature, the cooling system including a temperature detecting unit for detecting a temperature of a detection-subject portion of the optical member, a cooling unit for cooling a cooling-subject portion of the optical member, and a control unit for controlling the cooling unit on the basis of the detection by the temperature detecting unit.

REFERENCES:
patent: 4422725 (1983-12-01), Prewo
patent: 4825247 (1989-04-01), Kemi et al.
patent: 5754275 (1998-05-01), Takeda
patent: 5813233 (1998-09-01), Okuda et al.
patent: 6000227 (1999-12-01), Kroeker
patent: 6098408 (2000-08-01), Levinson et al.
patent: 6298669 (2001-10-01), Maruyama et al.
patent: 6359678 (2002-03-01), Ota
patent: 6846086 (2005-01-01), Goldstein
patent: 2002/0027644 (2002-03-01), Bisschops
patent: 2004/0165161 (2004-08-01), Hara
patent: 2004/0174504 (2004-09-01), Hara et al.
patent: 2004/0200226 (2004-10-01), Hara
patent: 2004/0218160 (2004-11-01), Hara
patent: 2004/0227914 (2004-11-01), Hara
patent: 2004/0227920 (2004-11-01), Hara
patent: 2005/0073663 (2005-04-01), Miyajima
patent: 1 318 431 (2003-06-01), None
patent: 2000-98092 (2000-04-01), None
patent: 2003-68626 (2003-03-01), None
European Search Report dated Jul. 14, 2005.
European Patent Office-Communication dated Jul. 28, 2005.

Affiliated with

Also associated with

Rating

Cooling system, exposure apparatus having the same, and... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Cooling system, exposure apparatus having the same, and..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Cooling system, exposure apparatus having the same, and... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3753625