Valve unit and fluid control chip

Details Valve unit and fluid control chip Valve unit and fluid control chip

2007-01-16

2007-01-16

Lee, Kevin (Department: 3753)

Fluid handling

Systems

Programmer or timer

C137S038000

Reexamination Certificate

active

10684420

ABSTRACT:
A valve unit and a fluid control chip include: a valve chamber having an inlet and an outlet for a fluid; a valve element accommodated in the valve chamber; a piezoelectric element for applying vibrations to the valve chamber; and a driver for driving the piezoelectric element, wherein the piezoelectric element varies the opening by varying a frequency and/or an amplitude of the vibration applied to the valve chamber and by varying the amplitude of the valve element by the varied vibration.

REFERENCES:
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patent: 5441597 (1995-08-01), Bonne et al.
patent: 5603345 (1997-02-01), Franklin et al.
patent: 6003833 (1999-12-01), Tasi et al.
patent: 6082185 (2000-07-01), Saaski
patent: 6279872 (2001-08-01), Neuhaus
patent: 2293988 (1976-07-01), None
International Search Report dated Jan. 19, 2004.

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