Methods and systems for improved boundary contrast

Details Methods and systems for improved boundary contrast Methods and systems for improved boundary contrast

2007-01-02

2007-01-02

Mack, Ricky (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S225100, C385S018000, C356S138000, C356S614000

Reexamination Certificate

active

11272925

ABSTRACT:
The present invention relates to methods and systems that define feature boundaries in a radiation sensitive medium on a workpiece using a diffraction-type micromirror array, extending to production of patterns and structures on a semiconductor substrate. Workpieces include lithographic masks, integrated circuits and other electronic and optical devices. Particular aspects of the present invention are described in the claims, specification and drawings.

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Larry J. Hornbeck, “From Cathode Rays to Digital Micromirrors: A History of Electronic Projection Display Technology,” Digital Light Processing - Introduction TI Technical Journal Jul.-Sep. 1998, pp. 7-46.

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