Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2007-01-30
2007-01-30
Mack, Ricky (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S224200, C310S022000
Reexamination Certificate
active
10201625
ABSTRACT:
An optical unit is constructed by superposing and cementing the first substrate having fixed electrodes and the second substrate having a sheet-like member in which a moving plate-spring-like electrode is provided. Concentric through holes are provide at the middles of the sheet-like member of the first substrate and the second substrate, and an optical element, such as a lens, a mirror, or a prism, is mounted to the through hole of the sheet-like member. When voltages applied between the fixed electrodes and the moving electrode are controlled, the sheet-like member is displaced and thereby the optical element is deformed.
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Rai-Choudhury (ed.), “Handbook of Microlithography, Micromachinig and Microfabrication—vol. 2: Micromachining and Microfabrication,” The International Society for Optical Engineering, © 1997, pp. 484-497.
Kaneko Shinji
Nakane Takeshi
Nakao Toshihiro
Nishioka Kimihiko
Choi William
Mack Ricky
Olympus Corporation
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