Substrate inspection device and substrate inspecting method

Details Substrate inspection device and substrate inspecting method Substrate inspection device and substrate inspecting method

2007-04-10

2007-04-10

Hirshfeld, Andrew H. (Department: 2858)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S501000, C324S754120, C324S754120

Reexamination Certificate

active

11182017

ABSTRACT:
A laser beam irradiation unit irradiates a laser beam on a top surface pattern portion of a wiring to be inspected among plural wirings formed on a substrate, with an intensity high enough to cause laser abrasion or two-photon absorption at the irradiated portion. A D.C. power supply applies, via an ammeter, a predetermined voltage between an electrode portion that traps electrons released from the top surface portion and a contact prove pressed against a bottom surface pattern of the wiring. An open circuit state and a short-circuit state of the wiring are judged using a current value measured in the ammeter. It is thus possible to inspect a wiring for an open circuit and a short-circuit easily without bringing a probe into contact with the lands of wirings on a top surface of the substrate to be inspected.

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