Electric heating – Heating devices – With power supply and voltage or current regulation or...
Reexamination Certificate
2007-05-29
2007-05-29
Paschall, Mark (Department: 3742)
Electric heating
Heating devices
With power supply and voltage or current regulation or...
C219S121410, C219S497000, C430S330000, C216S048000
Reexamination Certificate
active
11352340
ABSTRACT:
With respect to a substrate on which a resist solution is applied, the inplane uniformity of the quality of a resist film is improved in a heating processing carried out before exposure, and the yields of products are improved. A substrate on which a resist solution is applied is mounted on a heating plate in a processing vessel. Then, a purge gas is supplied into the processing vessel, and heating is started. Above the mounting position of the substrate, a thickness detecting sensor for monitoring the thickness of the resist film formed on the surface of the substrate is provided. When the thickness becomes a predetermined value or less, a control part cause a lift pin to upwardly move so as to increase the distance between the substrate and the heating plate. Thus, the heating value applied to the substrate decreases, and thereafter, only the solvent is volatilized without having a bad influence on a polymer in the resist film.
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Kitano Takahiro
Shinya Hiroshi
Paschall Mark
Tokyo Electron Limited
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