Mask for laser irradiation and apparatus for laser...

Details Mask for laser irradiation and apparatus for laser... Mask for laser irradiation and apparatus for laser...

2007-04-17

2007-04-17

Rosasco, S. (Department: 1756)

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

Reexamination Certificate

active

10705891

ABSTRACT:
A laser beam mask for shaping a laser beam includes a base substrate having first and second surfaces and having at least one first open portion, and a reflecting layer on the first surface of the base substrate, wherein the reflecting layer has at least one second open portion corresponding to the at least one first open portion and totally reflects the laser beam.

REFERENCES:
patent: 5387484 (1995-02-01), Doany et al.
patent: 5609977 (1997-03-01), Iwamatsu et al.

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