Lithographic apparatus and device manufacturing method with...

Details Lithographic apparatus and device manufacturing method with... Lithographic apparatus and device manufacturing method with...

2007-03-20

2007-03-20

Epps, Georgia (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

Photocell controls its own optical systems

C355S053000

Reexamination Certificate

active

10705816

ABSTRACT:
A map of the surface of a substrate is generated at a measurement station. The substrate is then moved to where a space between a projection lens and the substrate is filled with a liquid. The substrate is then aligned using, for example, a transmission image sensor and, using the previous mapping, the substrate can be accurately exposed. Thus the mapping does not take place in a liquid environment.

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