Temperature-insensitive polymeric optical AWG device and...

Details Temperature-insensitive polymeric optical AWG device and... Temperature-insensitive polymeric optical AWG device and...

2007-07-24

2007-07-24

Song, Sarah (Department: 2874)

Optical waveguides

With optical coupler

Input/output coupler

Reexamination Certificate

active

11361204

ABSTRACT:
Provided are a temperature-insensitive polymeric optical AWG device and method of manufacturing the same. The temperature-insensitive polymeric optical AWG device includes: polymeric grating channel waveguides interposed between free propagation slab regions on a substrate between the input and output waveguides and having different lengths; a plurality of hollow trenches formed by selectively etching a surface of the substrate under the polymeric grating channel waveguides and allowing the polymeric grating channel waveguides to freely thermally expand from the substrate depending on a temperature variation; and a shield layer shielding entrances of the hollow trenches so that the polymeric grating channel waveguides do not flow into the hollow trenches.

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patent: 100164087 (1998-09-01), None
N. Keil, et al., “Athermal all-polymer arrayed-waveguide grating multiplexer”, Electronics Letters Apr. 26, 2001, vol. 37, No. 9 (pp. 579-580).
Renyuan Gao, et al., “Low-Insertion Loss Athermal AWG Multi/Demultiplexer Based on Perfluorinated Polymers”, Photon-X, Inc. (2 pp.), Sep. 2002.
Jong-Moo Lee, et al., “Athermalized Polymeric Arrayed-Waveguide Grating by Partial Detachment from a Si Substrate”, ETRI Journal, vol. 26, No. 3, Jun. 2004 (pp. 281-284).

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