Method for reduction of defects in wet processed layers

Details Method for reduction of defects in wet processed layers Method for reduction of defects in wet processed layers

2007-03-13

2007-03-13

Rachuba, M. (Department: 3723)

Abrading

Abrading process

Glass or stone abrading

C451S060000, C205S099000

Reexamination Certificate

active

10425782

ABSTRACT:
The present invention provides a method and apparatus for wet processing of a conductive layer using a degassed process solution such as a degassed electrochemical deposition solution, a degassed electrochemical polishing solution, a degassed electroless deposition solution, and a degassed cleaning solution. The technique includes degassing the process solution before delivering the degassed process solution to a processing unit or degassing the process solution in-situ, within the processing unit.

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