Electromechanical resonator and method for fabricating such...

Details Electromechanical resonator and method for fabricating such... Electromechanical resonator and method for fabricating such...

2007-03-27

2007-03-27

Schuberg, Darren (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S309000

Reexamination Certificate

active

10895616

ABSTRACT:
An electromechanical resonator includes a monocrystalline-silicon substrate (S) provided with an active zone (ZA) delimited by an insulating region, a vibrating beam (10) anchored by at least one of its free ends on the insulating region and including a monocrystalline-silicon vibrating central part (12), and a control electrode (E) arranged above the beam and bearing on the active zone. The central part (12) of the beam is separated from the active zone (ZA) and from the control electrode (E).

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Preliminary Search Report for French Application No. 03 09106 dated May 4, 2004.

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