Concentration measuring mechanism, exposure apparatus, and...

Details Concentration measuring mechanism, exposure apparatus, and... Concentration measuring mechanism, exposure apparatus, and...

2007-07-17

2007-07-17

Mathews, Alan (Department: 2851)

Chemistry: electrical and wave energy

Apparatus

Electrolytic

C073S031050, C355S030000

Reexamination Certificate

active

11015411

ABSTRACT:
In a concentration measuring mechanism, a first concentration meter that measures the concentration of a first gas inside an enclosed space is isolated by an isolator in an isolatable space isolated from the enclosed space in order to achieve high-precision measurement.

REFERENCES:
patent: 4770027 (1988-09-01), Ehara et al.
patent: 5872721 (1999-02-01), Huston et al.
patent: 11-087230 (1999-03-01), None
patent: 11-354409 (1999-12-01), None
patent: 2003-173964 (2003-06-01), None
English Translation of JP 2003-173964 (dated Jun. 20, 2003).
English Translation of JP 11-354409 (dated Dec. 24, 1999).
English Translation of JP 11-087230 (dated Mar. 30, 1999).

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