Linear motor, stage apparatus, exposure apparatus, and...

Details Linear motor, stage apparatus, exposure apparatus, and... Linear motor, stage apparatus, exposure apparatus, and...

2007-05-15

2007-05-15

Schuberg, Darren (Department: 2834)

Electrical generator or motor structure

Dynamoelectric

Linear

Reexamination Certificate

active

11133292

ABSTRACT:
Outflow of heat generated by a linear motor to the outside is suppressed. A linear motor according to the present invention is a linear motor used in a vacuum atmosphere, including a stator, a movable element movable relative to the stator, and a metal film formed on the surface of at least one of the stator and the movable element. This decreases the emissivity and reduces the outflow of heat by radiation from the linear motor.

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