Electron-beam actuated light modulator with a mechanical stop

Details Electron-beam actuated light modulator with a mechanical stop Electron-beam actuated light modulator with a mechanical stop

2007-05-01

2007-05-01

Spector, David (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S290000

Reexamination Certificate

active

11064359

ABSTRACT:
An electron beam actuated light modulator, including an actuatable mirror element carried by a pedestal and hinge portion, having an electrostatically more neutral first position and an electrostatically more charged second position, the mirror being actuatable in a first direction from the first position to the second position by charge accumulation, and is actuatable in a second direction from the second position to the first position by dissipation of the charge accumulation and a stop element positioned adjacent the mirror element in the first position, configured to limit movement of the mirror element in the second direction after the mirror reaches the first position traveling in the second direction.

REFERENCES:
patent: 6885494 (2005-04-01), Patel et al.
patent: 6900915 (2005-05-01), Nanjyo et al.

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