Method of forming a support frame for semiconductor packages

Semiconductor device manufacturing: process – Electron emitter manufacture

Reexamination Certificate

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C257S433000

Reexamination Certificate

active

11156732

ABSTRACT:
A semiconductor die package having an elastomeric substrate with a first support frame and a second support frame. The first support frame has a cavity within which a semiconductor die is placed. The second support frame may have an optional cavity. The optional cavity in the second support frame may have an optional rigid structure. The rigid structure may have a heating element formed within it.

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