Semiconductor device manufacturing: process – Electron emitter manufacture
Reexamination Certificate
2007-09-18
2007-09-18
Lebentritt, Michael (Department: 2812)
Semiconductor device manufacturing: process
Electron emitter manufacture
C257S433000
Reexamination Certificate
active
11156732
ABSTRACT:
A semiconductor die package having an elastomeric substrate with a first support frame and a second support frame. The first support frame has a cavity within which a semiconductor die is placed. The second support frame may have an optional cavity. The optional cavity in the second support frame may have an optional rigid structure. The rigid structure may have a heating element formed within it.
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Dickstein & Shapiro LLP
Lebentritt Michael
Micro)n Technology, Inc.
Stevenson André
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