Manufacturable single-chip hydrogen sensor

Details Manufacturable single-chip hydrogen sensor Manufacturable single-chip hydrogen sensor

2007-03-13

2007-03-13

Sines, Brian (Department: 1743)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Chemically responsive

C216S041000, C422S083000, C422S098000, C073S001010, C073S001020, C436S043000, C436S144000, C436S149000, C029S025010, C029S592100, C438S005000, C438S048000, C438S443000, C438S494000, C438S504000, C438S664000, C438S975000

Reexamination Certificate

active

10838718

ABSTRACT:
A robust single-chip hydrogen sensor and a method for fabricating such a sensor. By utilizing an interconnect metallization material that is the same or similar to the material used to sense hydrogen, or that is capable of withstanding an etchant used to pattern a hydrogen sensing portion, device yields are improved over prior techniques.

REFERENCES:
patent: 6450007 (2002-09-01), O'Connor

Affiliated with

Also associated with

Rating

Manufacturable single-chip hydrogen sensor does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Manufacturable single-chip hydrogen sensor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Manufacturable single-chip hydrogen sensor will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3733350