Microbolometer and its manufacturing method

Details Microbolometer and its manufacturing method Microbolometer and its manufacturing method

2007-07-10

2007-07-10

Hannaher, Constantine (Department: 2884)

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

Reexamination Certificate

active

10482237

ABSTRACT:
The invention concerns a microbolometer comprising a suspended part containing radiation-sensitive elements and consisting of a set of first zones and a set of second zones, the two sets being superimposed; furthermore, the materials constituting said zones and have thermal expansion coefficients sufficiently different for said suspended part to be deformed under the effect of a rise in temperature to be urged into contact with the substrate when the contact zone reaches a temperature Tcless than the destruction temperature Tdof the microbolometer. The invention is applicable to radiation detectors comprising an assembly of such microbolometers, and to various appliances comprising at least such a radiation detector.

REFERENCES:
patent: 5656816 (1997-08-01), Tanaka
patent: 6080988 (2000-06-01), Ishizuya et al.
patent: 6091050 (2000-07-01), Carr
patent: 6198098 (2001-03-01), Laou
patent: 6469301 (2002-10-01), Suzuki et al.
patent: 6621083 (2003-09-01), Cole
patent: WO 00/40938 (2000-07-01), None

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