Inkjet printhead with CMOS drive circuitry close to ink...

Incremental printing of symbolic information – Ink jet – Ejector mechanism

Reexamination Certificate

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C347S054000

Reexamination Certificate

active

10773188

ABSTRACT:
An inkjet printhead with nozzles4and liquid passages31, 32leading to each nozzle. The nozzles, ejection actuators14, associated drive circuitry22and liquid passage31, 32being formed on and through a wafer21using lithographically masked etching technique, such that the wafer has a droplet ejection side and a liquid supply side. Each of the liquid passage is formed by etching a hole31partially through the wafer21from the droplet ejection side, and etching a passage from the liquid supply side of the wafer21to the hole31. Etching a hole31into the wafer21from the droplet ejection side means the ink supply passage32can stop short of the interface between the dielectric23and the wafer21to prevent the etchant from tracking sideways and damaging the drive circuitry22. As the inlet hole31is relatively shallow, the removal of the resist is not overly difficult. This allows the distance between the drive circuitry22and the inlet hole31to be reduced to less than 20 microns. This permits a more compact overall design and higher nozzle packing density.

REFERENCES:
patent: 6364453 (2002-04-01), Silverbrook
patent: 6425651 (2002-07-01), Silverbrook
patent: 6536874 (2003-03-01), Silverbrook
patent: 2004/0104958 (2004-06-01), Silverbrook
patent: WO 00/23279 (2000-04-01), None

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