Apparatus for calibrating a probe station

Details Apparatus for calibrating a probe station Apparatus for calibrating a probe station

2007-03-06

2007-03-06

Patel, Paresh (Department: 2829)

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

C324S754090, C324S760020

Reexamination Certificate

active

10921151

ABSTRACT:
An apparatus for calibrating a probe station includes a disk having a flat bottom surface, a plurality of thermosensors for measuring a temperature of a wafer chuck of the probe station, the plurality of thermosensors being disposed at predetermined positions on a top surface of the disk, and a level disposed at a predetermined position on the top surface of the disk.

REFERENCES:
patent: 3154654 (1964-10-01), Woods et al.
patent: 3858978 (1975-01-01), Johannsmeier
patent: 4471535 (1984-09-01), Kufrovich et al.
patent: 5237267 (1993-08-01), Harwood et al.
patent: 6084215 (2000-07-01), Furuya et al.
patent: 6583638 (2003-06-01), Costello et al.
patent: 2003/0188686 (2003-10-01), Miyagi
patent: 29619981 (1998-03-01), None
patent: 2000-0046806 (2000-07-01), None
patent: 2003-0001830 (2003-01-01), None

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