Overlapping common-path interferometers for two-sided...

Details Overlapping common-path interferometers for two-sided... Overlapping common-path interferometers for two-sided...

2007-09-11

2007-09-11

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S485000, C356S492000

Reexamination Certificate

active

11023018

ABSTRACT:
Two common-path interferometers share a measuring cavity for measuring opposite sides of opaque test parts. Interference patterns are formed between one side of the test parts and the reference surface of a first of the two interferometers, between the other side of the test parts and the reference surface of a second of the two interferometers, and between the first and second reference surfaces. The latter measurement between the reference surfaces of the two interferometers enables the measurements of the opposite sides of the test parts to be related to each other.

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patent: 2004/0184038 (2004-09-01), Freischlad et al.
patent: 2005/0041257 (2005-02-01), Evans

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