MEMS teeter-totter apparatus with curved beam and method of...

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element

Reexamination Certificate

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C073S514380

Reexamination Certificate

active

11151442

ABSTRACT:
A teeter-totter apparatus uses a curved beam to generate a differential output which may be indicative of an acceleration applied to the apparatus. The curved-beam teeter-totter apparatus can be combined with an x-axis and y-axis accelerometer, to produce a tri-axis accelerometer which is sensitive to an acceleration applied in any direction. Damping plates may be added to the accelerometers to reduce unwanted motion.

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