Micromirror systems with electrodes configured for...

Details Micromirror systems with electrodes configured for... Micromirror systems with electrodes configured for...

2006-12-05

2006-12-05

Dang, Hung Xuan (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S291000

Reexamination Certificate

active

07145711

ABSTRACT:
Micromirror devices, especially for use in digital projection are disclosed. Other applications are contemplated as well. The devices employ a superstructure that includes a mirror supported over a hinge set above a substructure. Various improvements to the superstructure over known micromirror devices are provided. The features described are applicable to improve manufacturability, enable further miniaturization of the elements and/or to increase relative light return. Devices can be produced utilizing the various optional features described herein, possibly offering cost savings, lower power consumption, and higher resolution.

REFERENCES:
patent: 5991066 (1999-11-01), Robinson et al.
patent: 6487001 (2002-11-01), Greywall

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