Process of manufacturing a perpendicular magnetic pole...

Details Process of manufacturing a perpendicular magnetic pole... Process of manufacturing a perpendicular magnetic pole...

2006-10-17

2006-10-17

Tugbang, A. Dexter (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C029S603110, C029S603160, C029S603180, C360S125330, C427S282000, C216S022000, C216S044000, C451S036000

Reexamination Certificate

active

07120989

ABSTRACT:
For PMR (Perpendicular Magnetic Recording) design, one of the major technology problems is the use of CMP to fabricate the pole structure. If the device is under-polished there is a danger of leaving behind a magnetic shorting layer while if it is over-polished there may be damage to the main pole. This problem has been overcome by surrounding the main pole, write gap, stitched write head pillar with a layer of CMP etch stop material which, using optical inspection alone, allows CMP (performed under a first set of conditions) to be terminated just as the stitched write head gets exposed. This is followed by a second CMP step (performed under a second set of conditions) for further fine trimming of the stitched head, as needed.

REFERENCES:
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patent: 57-113411 (1982-07-01), None
Oyama et al., “Planar Yoke Write Head for Half-Micron Track Width”, IEEE Transactions on Magnetics, vol. 36, No. 5, Sep. 2000, pp. 2509-2513.

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