Probe device and display substrate testing apparatus using same

Details Probe device and display substrate testing apparatus using same Probe device and display substrate testing apparatus using same

2006-12-19

2006-12-19

Hirshfeld, Andrew H. (Department: 2858)

Electricity: measuring and testing

Impedance, admittance or other quantities representative of...

Lumped type parameters

C324S701000

Reexamination Certificate

active

07151384

ABSTRACT:
A plasma having a certain density is generated between a test electrode and an electrode on a display substrate comprising a TFT array which is a circuit under test, and a test signal is transmitted between the electrode and the test electrode via the plasma. With this technique, a probe means and a testing apparatus enabling measurement of the electrical characteristics of the TFT array formed on the display substrate in a non-contact manner can be provided.

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