Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate
2006-12-05
2006-12-05
Budd, Mark (Department: 2834)
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
C310S330000, C310S331000, C310S363000, C310S364000
Reexamination Certificate
active
07145285
ABSTRACT:
A piezoelectric element includes a first electrode; a piezoelectric layered film composed of a first piezoelectric film formed on the first electrode film and a second piezoelectric film that is formed on the first piezoelectric film and is controlled in crystal orientation thereof by the first piezoelectric film; and a second electrode film formed on the second piezoelectric film. Each of the first and second piezoelectric films is an aggregate of columnar grains grown unidirectionally along a thickness direction of the piezoelectric layered film. A columnar grain of the second piezoelectric film has a larger cross-sectional diameter than a columnar grain of the first piezoelectric film. A ratio l/d of the thickness l of the piezoelectric layered film to the cross-sectional diameter d of the second piezoelectric film is not less than 20 and not more than 60.
REFERENCES:
patent: 5176033 (1993-01-01), Jones et al.
patent: 6093338 (2000-07-01), Tani et al.
patent: 6411017 (2002-06-01), Qiu et al.
patent: 6610361 (2003-08-01), Heuer et al.
patent: 2000-208828 (2000-07-01), None
patent: 3481235 (2003-10-01), None
patent: 2004-047928 (2004-02-01), None
Takayama et al. “Preparation of epitaxial Pb (SrxTi1-x) O3thin films and their crystallographic, pyroelectric, and ferroelectric properties”; J. Appl. Phys. 65(4); pp. 1666-1670; Feb. 15, 1989.
Fujii Eiji
Fujii Satoru
Kamada Takeshi
Torii Hideo
Budd Mark
Harness & Dickey & Pierce P.L.C.
Matushita Electric Industrial Co. Ltd.
LandOfFree
Piezoelectric element, fabrication method for the same, and... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Piezoelectric element, fabrication method for the same, and..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Piezoelectric element, fabrication method for the same, and... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3716047