Optical element holder, exposure apparatus, and device...

Details Optical element holder, exposure apparatus, and device... Optical element holder, exposure apparatus, and device...

2006-10-03

2006-10-03

Ben, Loha (Department: 2873)

Optical: systems and elements

Lens

With support

C359S288000, C219S544000, C219S522000, C219S200000, C372S034000, C372S036000, C372S107000, C374S043000, C355S067000

Reexamination Certificate

active

07116501

ABSTRACT:
An optical element holder for holding an optical element includes a holding element to hold the optical element or a holding part provided to the optical element unitedly, wherein there is substantially no heat exchange between the optical element and the holding element or the holding part and the holding element.

REFERENCES:
patent: 4621929 (1986-11-01), Phillips
patent: 4671624 (1987-06-01), Kahan
patent: 4737798 (1988-04-01), Lonis et al.
patent: 4918702 (1990-04-01), Kimura
patent: 5640407 (1997-06-01), Freyman et al.
patent: 5652763 (1997-07-01), Delfyett, Jr.
patent: 5717712 (1998-02-01), Swaminathan et al.
patent: 5838713 (1998-11-01), Shimoji
patent: 5848082 (1998-12-01), Shum
patent: 5883704 (1999-03-01), Nishi et al.
patent: 6198579 (2001-03-01), Rupp
patent: 6676306 (2004-01-01), Ikeda et al.
patent: 6697399 (2004-02-01), Kimura et al.
patent: 6768600 (2004-07-01), Dieker

Affiliated with

Also associated with

Rating

Optical element holder, exposure apparatus, and device... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Optical element holder, exposure apparatus, and device..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Optical element holder, exposure apparatus, and device... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3714749