Methods and apparatus for positioning a substrate relative...

Details Methods and apparatus for positioning a substrate relative... Methods and apparatus for positioning a substrate relative...

2006-12-19

2006-12-19

Tran, Khoi H. (Department: 3651)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Article handling

C414S935000, C414S936000, C414S941000

Reexamination Certificate

active

07151981

ABSTRACT:
In a first aspect, a substrate positioning system includes a plurality of pushers arranged in a spaced relation about a stage adapted to support a substrate. Each pusher is adapted to assume a retracted position so as to permit the substrate to be loaded onto and unloaded from the stage, extend toward an edge of the substrate that is supported by the stage, contact the edge of the substrate, and continue extending so as to cause the substrate to move relative to the stage until the substrate is calibrated to the stage. Numerous other aspects are provided.

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