Registers – Records
Reexamination Certificate
2006-12-12
2006-12-12
Le, Thien M. (Department: 2876)
Registers
Records
C235S462050
Reexamination Certificate
active
07147166
ABSTRACT:
A bar code containing information about a reticle (transparent substrate) is marked on the reticle at a portion vertically overlapping a transfer hand when the reticle held by the transfer hand is transferred. A reflecting portion is formed on the transfer hand at a portion corresponding to the bar code. A bar code reader has an illumination portion and detection portion. When the reticle is held and transferred by the transfer hand, the illumination portion illuminates the bar code, and the detection portion detects light reflected by the reflecting portion to read the bar code. The illumination portion and detection portion of the bar code reader may be separated and disposed to oppose each other through the reticle, thereby reading the bar code in the transmission scheme.
REFERENCES:
patent: 4010355 (1977-03-01), Roehrman et al.
patent: 4532970 (1985-08-01), Tullis et al.
patent: 4534389 (1985-08-01), Tullis
patent: 4616683 (1986-10-01), Tullis et al.
patent: 4716299 (1987-12-01), Tanaka et al.
patent: 4999671 (1991-03-01), Iizuka
patent: 5822524 (1998-10-01), Chen et al.
patent: 5864130 (1999-01-01), Kahn et al.
patent: 5929978 (1999-07-01), Masaki
patent: 6048655 (2000-04-01), Nakahara
patent: 6303398 (2001-10-01), Goerigk
patent: 6460770 (2002-10-01), Kucharczyk
patent: 6597969 (2003-07-01), Greenwald et al.
patent: 6618640 (2003-09-01), Hittner et al.
patent: 64-58859 (1989-03-01), None
patent: 5-66733 (1993-09-01), None
patent: 7-66118 (1995-03-01), None
patent: 10-149983 (1998-06-01), None
patent: 11-65093 (1999-03-01), None
*Abstract for Corresponding Japanese Patent Application Publication No. 60-227437, published Nov. 12, 1985.
Caputo Lisa M.
Le Thien M.
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